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<timestamp>20230304053041037</timestamp>
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  <email_address>director@blueeyesintelligence.org</email_address>
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<journal_metadata>   <full_title>International Journal of Recent Technology and Engineering (IJRTE)</full_title>   <abbrev_title>IJRTE</abbrev_title>   <issn media_type='electronic'>22773878</issn>   <doi_data>     <doi>10.35940/ijrte.2277-3878</doi>     <resource>https://www.ijrte.org/</resource>   </doi_data> </journal_metadata> <journal_issue>  <publication_date media_type='online'>     <month>03</month>     <day>30</day>     <year>2023</year>   </publication_date>   <journal_volume>     <volume>11</volume>   </journal_volume>   <issue>6</issue> </journal_issue><!-- ============== --> <journal_article publication_type='full_text'>   <titles>     <title>Design and Fabrication of Mems U-Shaped Cantilever</title>   </titles>   <contributors>      <organization sequence='first' contributor_role='author'>Department of Electronics, PRISM Degree College Andhra University, Visakhapatnam (A.P), India</organization>    <person_name sequence='first' contributor_role='author'>      <given_name>Dr. K. Durga</given_name>      <surname>Aparna</surname>      <ORCID>https://orcid.org/0000-0001-9865-8107</ORCID>    </person_name>    <person_name sequence='additional' contributor_role='author'>       <given_name>K. L. V.</given_name>       <surname>Nagasree</surname>     </person_name>     <organization sequence='additional' contributor_role='author'>Department of Physics, Andhra University, Visakhapatnam (A.P), India</organization>     <person_name sequence='additional' contributor_role='author'>       <given_name>G. Lalitha</given_name>       <surname>Devi</surname>     </person_name>     <organization sequence='additional' contributor_role='author'>Department of Mathematics, PRISM Degree College Andhra University, Visakhapatnam (A.P), India</organization>   </contributors>    <jats:abstract xml:lang='en'>         <jats:p>MEMS are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. The fundamental part of every sensor is the transducer which converts the measurend of intrest into and interpretable output signal. The most prominent transducer is the piezoresistive cantilever which translates any signal into an electrical signal.This paper presents the deisgn and fabrication of U shaped cantilever with enhanced sensitivity and stiffness which gives better results than other cantilevers. The simulation results of the cantilevers are designed using COMSOL software. MEMS technology becomes more affordable better and easier to fabricate in increasing quantities. Each layer of fabrication process is quite complex and final fabricated product will tested and used for high end applications.</jats:p>     </jats:abstract>  <publication_date media_type='online'>     <month>03</month>     <day>30</day>     <year>2023</year>   </publication_date>   <pages>     <first_page>80</first_page>     <last_page>83</last_page>   </pages>   <crossmark>     <crossmark_version>CC BY-NC-ND 4.0</crossmark_version>     <crossmark_policy>10.35940/BEIESP.CrossMarkPolicy</crossmark_policy>     <crossmark_domains>       <crossmark_domain>          <domain>www.ijrte.org</domain>       </crossmark_domain>     </crossmark_domains>     <crossmark_domain_exclusive>true</crossmark_domain_exclusive>     <custom_metadata>       <assertion explanation='Funding' group_label='Funding' group_name='Funding' name='Declaration' order='0'>No, I did not receive.</assertion>       <assertion explanation='Conflicts of Interest' group_label='Conflicts of Interest' group_name='Conflicts-of-Interest' name='Declaration' order='1'>No conflicts of interest to the best of our knowledge.</assertion>       <assertion explanation='Ethical Approval and Consent to Participate' group_label='Ethical Approval and Consent to Participate' group_name='Ethical-Approval-and-Consent-to-Participate' name='Declaration' order='2'>No, the article does not require ethical approval and consent to participate with evidence.</assertion>       <assertion explanation='Availability of Data and Material' group_label='Availability of Data and Material' group_name='Availability-of-Data-and-Material' name='Declaration' order='3'>Not relevant.</assertion>       <assertion explanation='Authors Contributions' group_label='Authors Contributions' group_name='Authors-Contributions' name='Declaration' order='4'>If applicable and having more than 01 authors: All authors have individual partnerships in this article. The first author has worked on the design of cantilevers and the second author has worked on the fabrication technologies and the third author has worked on mathematical works on the cantilever.</assertion>     </custom_metadata>   </crossmark>   <doi_data>     <doi>10.35940/ijrte.F7496.0311623</doi>     <resource>https://www.ijrte.org/portfolio-item/F74960311623/</resource>   </doi_data> </journal_article>
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