Design and Fabrication of Mems U-Shaped Cantilever
K.Durga Aparna1, K. L. V. Nagasree2, G. Lalitha Devi3
1Dr. K. Durga Aparna, Department of Electronics, PRISM Degree College Andhra University, Visakhapatnam (A.P), India.
2K. L. V. Nagasree, Department of Physics, Andhra University, Visakhapatnam (A.P), India.
3G. Lalitha Devi, Department of Mathematics, PRISM Degree College Andhra University, Visakhapatnam (A.P), India.
Manuscript received on 24 February 2023 | Revised Manuscript received on 03 March 2023 | Manuscript Accepted on 15 March 2023 | Manuscript published on 30 March 2023 | PP: 80-83 | Volume-11 Issue-6, March 2023 | Retrieval Number: 100.1/ijrte.F74960311623 | DOI: 10.35940/ijrte.F7496.0311623
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: MEMS are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. The fundamental part of every sensor is the transducer which converts the measurend of intrest into and interpretable output signal. The most prominent transducer is the piezoresistive cantilever which translates any signal into an electrical signal. This paper presents the deisgn and fabrication of U shaped cantilever with enhanced sensitivity and stiffness which gives better results than other cantilevers. The simulation results of the cantilevers are designed using COMSOL software. MEMS technology becomes more affordable better and easier to fabricate in increasing quantities. Each layer of fabrication process is quite complex and final fabricated product will tested and used for high end applications.
Keywords: Mems, Fabrication, Cantilever, Comsol
Scope of the Article: Design and Diagnosis