Advancement in Research of Smart Metals and Materials Used For Fabrication of “MEMS” Components-Review
Paul Pandian P
Dr. P. Paul pandian, Professor- Mechanical Engineering, Malla. Reddy(Main campus) Engineering College(Autonomous),India.
Manuscript received on 24 January 2019 | Revised Manuscript received on 30 March 2019 | Manuscript published on 30 January 2019 | PP: 269-272 | Volume-7 Issue-6, March 2019 | Retrieval Number: E1929017519©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: Even, numerous polymers and composites of materials developed so far, the adopting them in MEMS components is still challenging .The mechanical properties, electrical properties of those materials varies independently. In addition to, the components used in MEMS have micro level dimensions and different specifications. Tedious work and concentration is need for Choosing of suitable metals and materials for specific application while fabricating MEMS Components. In this survey paper ,advancement in research for finding the metals and materials used for fabrication MEMS parts and components, metal micro films fabrication and metal conductors, structural parts of micro sensors and micro actuators magnetic actuators for micro-devices, are try to explore to researchers . Various research papers related to MEMS material were collected from the literature. The name of metal and materials are mentioned and described briefly in an order. The MEMS fabrication methods are not discussed.
Keywords: MEMS, Matels, Materials, Alloys, Fabrication
Scope of the Article: Smart Antenna