Performance Analysis of SAW Gas Sensors with Different Number of Electrodes
Anuj Kumar Goel1, B. Siva Kumar Reddy2
1Anuj Kumar Goel *, Professor, Dept. of ECE, CMR Engineering College, Kandlakoya, Telangana, India.
2B Siva Kumar Reddy, Associate Professor, Dept. of ECE, CMR Engineering College, Kandlakoya, Telangana, India.
Manuscript received on 01 August 2019. | Revised Manuscript received on 4 August 2019. | Manuscript published on 30 September 2019. | PP: 4396-4401 | Volume-8 Issue-3 September 2019 | Retrieval Number: C5530098319/2019©BEIESP | DOI: 10.35940/ijrte.C5530.098319
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: SAW technology is used to detect presence of certain molecules as used for gas sensing. Different geometries are designed with variation in number of interdigitated electrodes. Designed device used the layers of materials with variation of depth. FEM analysis is performed for two different structures. Shift in resonant frequency is observed as performance measuring parameter. Deformed shape plots are obtained with electric potential distributions for different eigenfrequencies. Different simulation results are compared to get highly sensitive device. Applications are found in many applications to sense micro, nano particles etc.
Keywords: SAW Devices, Gas Sensor, Interdigitated Transducer (IDT).
Scope of the Article: Measurement & Performance Analysis