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The Effect of Sensor Structure and Coplanar Electrode for Capacitive Based Flow Sensor
Mohd Norzaidi Mat Nawi1, Nur Shahira Shahripul Azeman2, Muhammad Rashidi Ab Razak3 

1Mohd Norzaidi Mat Nawi, Department of Physics, Universiti Pendidikan Sultan Idris, Perak, Malaysia.
2Nur Shahira Shahripul Azeman, Department of Physics, Universiti Pendidikan Sultan Idris, Perak, Malaysia.
3Muhammad Rashidi Ab Razak, Department of Physics, Universiti Pendidikan Sultan Idris, Perak, Malaysia.

Manuscript received on 07 March 2019 | Revised Manuscript received on 15 March 2019 | Manuscript published on 30 July 2019 | PP: 4795-4799 | Volume-8 Issue-2, July 2019 | Retrieval Number: B2257078219/19©BEIESP | DOI: 10.35940/ijrte.B2257.078219
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)

Abstract: This paper presents the analysis of the capacitive based flow sensor using computational fluid dynamic (CFD) and mathematical equation approach. The CFD simulations for different types of sensor structure were carried out. Pressure and velocity of the fluid were varied in order to study the hydrodynamic parameter such as displacement and drag force. For the coplanar electrode, width of electrode and half gap between electrodes were varied for capacitive response using mathematical approach. Based on the simulation, the displacement of the dome increases as the pressure increases. The result shows that the most suitable thickness of the dome is 0.1 mm based on the displacement and the strain. Meanwhile for the coplanar electrode, the width and half gap showed a significant effect on the capacitance response.
Index Terms: Capacitive Flow Sensor, CFD, Coplanar Electrode.

Scope of the Article: Applied Mathematics and Mechanics