Influence of Deposition on the Mechanical Property Correlation in Al-O Thin Films with Complex Microstructures by RF Magnetron Sputtering
R. Hariharan1, R. Raja2, A. S.Anish3, S. Balaji4, M. Aswin5, J. Roshan6
1R. Hariharan, Research Scholar, Assistant Professor, Department of Mechanical Engineering, Bharath Bharath Institute of Higher Education and Research, Chennai (Tamil Nadu), India.
2R. Raja, Professor, Department of Mechanical Engineering, Bharath Bharath Institute of Higher Education and Research, Chennai Chennai (Tamil Nadu), India.
3A. S. Anish, Department of Mechanical Engineering, Bharath Bharath Institute of Higher Education and Research, Chennai Chennai (Tamil Nadu), India.
4S. Balaji, Department of Mechanical Engineering, Bharath Bharath Institute of Higher Education and Research, Chennai Chennai (Tamil Nadu), India.
5M. Aswin, Department of Mechanical Engineering, Bharath Bharath Institute of Higher Education and Research, Chennai Chennai (Tamil Nadu), India.
5J. Roshan, Department of Mechanical Engineering, Bharath Bharath Institute of Higher Education and Research, Chennai Chennai (Tamil Nadu), India.
Manuscript received on 26 March 2019 | Revised Manuscript received on 05 April 2019 | Manuscript Published on 27 April 2019 | PP: 579-583 | Volume-7 Issue-6S2 April 2019 | Retrieval Number: F9083047619/2019©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: AL-O films were ready on unwarmed 4140 steel abstract by RF magnetron sputtering technique. Post-deposition hardening of AL-O films in vacuum was found to enhance film structure and electrical characteristics like dense structure, swish surface stress relief and increase electrical resistance appropriate hardening temperature conjointly reduced loss issue. The coordination between hardening conditions and also the body of the films (crystalline structure and microstructure) was examined by X-ray diffraction (XRD) scanning electron microscopy (SEM) atomic force microscopy(AFM) and FESEM with EDAX.The mechanical behaviour of nano crystalline CNC metals has attracted widespread interest through the bulk of efforts have centred on economically pure metals.
Keywords: EDAX; XRD; AFM; FESEM.
Scope of the Article: Mechanical Maintenance